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Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography

Ruan, Yinlan; Kim, Myung-Ki; Lee, Yong-Hee; Luther-Davies, Barry; Rode, Andrei

Description

The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beamlithography and chemically assisted ion beametching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricatedcavities presented coupling dips of −2.6dB at the wavelength of 1550nm and...[Show more]

dc.contributor.authorRuan, Yinlan
dc.contributor.authorKim, Myung-Ki
dc.contributor.authorLee, Yong-Hee
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorRode, Andrei
dc.date.accessioned2015-12-21T03:11:42Z
dc.date.available2015-12-21T03:11:42Z
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/1885/95130
dc.description.abstractThe authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beamlithography and chemically assisted ion beametching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricatedcavities presented coupling dips of −2.6dB at the wavelength of 1550nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.
dc.description.sponsorshipThe authors thank the Endeavor Australian Cheungkong award for financial support and the support of the Australian Research Council through its Federation Fellow and Centers of Excellence Programs.
dc.publisherAmerican Institute of Physics (AIP)
dc.rightshttp://www.sherpa.ac.uk/romeo/issn/0003-6951..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 21/12/15). Copyright 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https://doi.org/10.1063/1.2476416
dc.sourceApplied Physics Letters
dc.subjectKeywords: Glass; Ion beam lithography; Photons; Reactive ion etching; Chalcogenide; Coupling dips; Nanocavities; Side hole position; Crystal resonators
dc.titleFabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume90
dc.date.issued2007
local.identifier.absfor100507
local.identifier.ariespublicationu9912193xPUB159
local.publisher.urlhttps://www.aip.org/
local.type.statusPublished Version
local.contributor.affiliationRuan, Yinlan, University of Adelaide, Australia
local.contributor.affiliationKim, Myung-Ki, Korea Advanced Institute of Science and Technology, Korea, South
local.contributor.affiliationLee, Yong Hee, Korea Advanced Institute of Science and Technology, Korea, South
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Laser Physics Centre, The Australian National University
local.contributor.affiliationRode, Andrei V, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Laser Physics Centre, The Australian National University
local.bibliographicCitation.issue7
local.bibliographicCitation.startpage071102
local.bibliographicCitation.lastpage3
local.identifier.doi10.1063/1.2476416
dc.date.updated2016-02-24T12:14:28Z
local.identifier.scopusID2-s2.0-33847173764
CollectionsANU Research Publications

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