Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography
The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beamlithography and chemically assisted ion beametching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricatedcavities presented coupling dips of −2.6dB at the wavelength of 1550nm and...[Show more]
|Collections||ANU Research Publications|
|Source:||Applied Physics Letters|
|01_Ruan_Fabrication_of_high-Q_2007.pdf||Published Version||407.45 kB||Adobe PDF|
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