Skip navigation
Skip navigation

Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography

Ruan, Yinlan; Kim, Myung-Ki; Lee, Yong-Hee; Luther-Davies, Barry; Rode, Andrei


The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beamlithography and chemically assisted ion beametching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricatedcavities presented coupling dips of −2.6dB at the wavelength of 1550nm and...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.2476416


File Description SizeFormat Image
01_Ruan_Fabrication_of_high-Q_2007.pdfPublished Version407.45 kBAdobe PDFThumbnail

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  20 July 2017/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator