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Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography

Ruan, Yinlan; Kim, Myung-Ki; Lee, Yong-Hee; Luther-Davies, Barry; Rode, Andrei


The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beamlithography and chemically assisted ion beametching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricatedcavities presented coupling dips of −2.6dB at the wavelength of 1550nm and...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.2476416


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