Mechanochemical Reaction and Formation of an Amorphous Nitride Phase During Ball Milling of Si in NH3

Abstract

The formation of an amorphous SixNyH phase is obtained by a solid-gas mechanochemical reaction induced by ball milling of Si in NH3 gas. We suggest that mechanical damage together with absorbed N and H play an important role in the formation and stability of the amorphous SixNyH phase during milling. Transmission electron microscopy, x-ray diffraction, thermal analysis, and composition analysis have been used to characterize the samples after ball milling and subsequent annealing. Crystallization of the amorphous phase to α-Si3N4 is observed at temperatures above 800°C.