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Proton irradiation of n-type GaAs

Goodman, S; Auret, Francois D; Ridgway, Mark C; Myburg, G


In this paper, we report on the defects introduced during 40 keV, 95 keV, 400 keV and 1 MeV proton irradiation of Si-doped epitaxial GaAs. These protons introduce defects Ep1 (E1), Ep2 (E2), Ep4 (E3), Ep5, Ep6 and a metastable defect Ep3. Defect Ep6 has a large capture cross-section (>10-13 cm-2) suggesting that it may be a physically large defect or a defect cluster.

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B


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