Refractive indices and thickness of optical waveguides fabricated by Si ion implantation into silica glass
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Gerondakis, Steve; Kubica, J; Zamora, M; Reeves, G K; Ridgway, Mark C; Johnson, Christopher
Description
Planar optical waveguides formed by Si ion implantation into PECVD SiO2 have been characterized by the dark mode spectroscopy method at a wavelength of 0.6328 μm. The measured effective index values of the guided modes have been used to investigate the o
dc.contributor.author | Gerondakis, Steve | |
---|---|---|
dc.contributor.author | Kubica, J | |
dc.contributor.author | Zamora, M | |
dc.contributor.author | Reeves, G K | |
dc.contributor.author | Ridgway, Mark C | |
dc.contributor.author | Johnson, Christopher | |
dc.date.accessioned | 2015-12-13T23:34:55Z | |
dc.identifier.issn | 0040-6090 | |
dc.identifier.uri | http://hdl.handle.net/1885/93672 | |
dc.description.abstract | Planar optical waveguides formed by Si ion implantation into PECVD SiO2 have been characterized by the dark mode spectroscopy method at a wavelength of 0.6328 μm. The measured effective index values of the guided modes have been used to investigate the o | |
dc.publisher | Elsevier | |
dc.source | Thin Solid Films | |
dc.subject | Keywords: Annealing; Glass; Ion implantation; Plasma enhanced chemical vapor deposition; Refractive index; Silica; Dark mode spectroscopy method; Silicon oxide; Optical waveguides | |
dc.title | Refractive indices and thickness of optical waveguides fabricated by Si ion implantation into silica glass | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.citationvolume | 340 | |
dc.date.issued | 1999 | |
local.identifier.absfor | 090699 - Electrical and Electronic Engineering not elsewhere classified | |
local.identifier.ariespublication | MigratedxPub25063 | |
local.type.status | Published Version | |
local.contributor.affiliation | Gerondakis, Steve, Walter and Eliza Hall Institute of Medical Research | |
local.contributor.affiliation | Kubica, J, Warsaw University of Technology | |
local.contributor.affiliation | Zamora, M, RMIT University | |
local.contributor.affiliation | Reeves, G K, RMIT University | |
local.contributor.affiliation | Ridgway, Mark C, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Johnson, Christopher, College of Physical and Mathematical Sciences, ANU | |
local.description.embargo | 2037-12-31 | |
local.bibliographicCitation.startpage | 233 | |
local.bibliographicCitation.lastpage | 236 | |
local.identifier.doi | 10.1016/S0040-6090(98)01333-9 | |
dc.date.updated | 2015-12-12T09:37:57Z | |
local.identifier.scopusID | 2-s2.0-0032650146 | |
Collections | ANU Research Publications |
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