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Refractive indices and thickness of optical waveguides fabricated by Si ion implantation into silica glass

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Gerondakis, Steve; Kubica, J; Zamora, M; Reeves, G K; Ridgway, Mark C; Johnson, Christopher

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Planar optical waveguides formed by Si ion implantation into PECVD SiO2 have been characterized by the dark mode spectroscopy method at a wavelength of 0.6328 μm. The measured effective index values of the guided modes have been used to investigate the o

dc.contributor.authorGerondakis, Steve
dc.contributor.authorKubica, J
dc.contributor.authorZamora, M
dc.contributor.authorReeves, G K
dc.contributor.authorRidgway, Mark C
dc.contributor.authorJohnson, Christopher
dc.date.accessioned2015-12-13T23:34:55Z
dc.identifier.issn0040-6090
dc.identifier.urihttp://hdl.handle.net/1885/93672
dc.description.abstractPlanar optical waveguides formed by Si ion implantation into PECVD SiO2 have been characterized by the dark mode spectroscopy method at a wavelength of 0.6328 μm. The measured effective index values of the guided modes have been used to investigate the o
dc.publisherElsevier
dc.sourceThin Solid Films
dc.subjectKeywords: Annealing; Glass; Ion implantation; Plasma enhanced chemical vapor deposition; Refractive index; Silica; Dark mode spectroscopy method; Silicon oxide; Optical waveguides
dc.titleRefractive indices and thickness of optical waveguides fabricated by Si ion implantation into silica glass
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume340
dc.date.issued1999
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.ariespublicationMigratedxPub25063
local.type.statusPublished Version
local.contributor.affiliationGerondakis, Steve, Walter and Eliza Hall Institute of Medical Research
local.contributor.affiliationKubica, J, Warsaw University of Technology
local.contributor.affiliationZamora, M, RMIT University
local.contributor.affiliationReeves, G K, RMIT University
local.contributor.affiliationRidgway, Mark C, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJohnson, Christopher, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage233
local.bibliographicCitation.lastpage236
local.identifier.doi10.1016/S0040-6090(98)01333-9
dc.date.updated2015-12-12T09:37:57Z
local.identifier.scopusID2-s2.0-0032650146
CollectionsANU Research Publications

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