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Refractive indices and thickness of optical waveguides fabricated by Si ion implantation into silica glass

Gerondakis, Steve; Kubica, J; Zamora, M; Reeves, G K; Ridgway, Mark C; Johnson, Christopher

Description

Planar optical waveguides formed by Si ion implantation into PECVD SiO2 have been characterized by the dark mode spectroscopy method at a wavelength of 0.6328 μm. The measured effective index values of the guided modes have been used to investigate the o

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
URI: http://hdl.handle.net/1885/93672
Source: Thin Solid Films
DOI: 10.1016/S0040-6090(98)01333-9

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