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Implantation-induced Amorphization of InP Characterised with perturbed Angular Correlation

Bezakova, E; Vianden, R; Glover, Christopher; Ridgway, Mark C


The perturbed angular correlation (PAC) technique has been used to characterize the implantation-induced crystal line-to-amorphous transformation in InP. Radioactive 111In probes were first introduced in InP substrates which were then irradiated with Ge ions over an ion-dose range extending 2 orders of magnitude beyond that required for amorphization. Crystalline, disordered and amorphous probe environments were subsequently identified with PAC. The dose dependence of the relative fractions of...[Show more]

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
Source: Applied Physics Letters


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