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A Model of Plasma-Based Ion Implantation Around a Round Hole in a Flat Plate

Sheridan, T

Description

We use a two-dimensional hybrid simulation (particle ions and Boltzmann electrons) to study sheath and ion dynamics around a small round hole in a flat, conducting plate following the application of a large, negative voltage pulse, such as might be encountered during plasma-based ion implantation. Results for hole radii of an eighth and half the ion-matrix overlap length and for depths of one, two and four times the radius are reported. For all these cases, it is found that the hole represents...[Show more]

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
URI: http://hdl.handle.net/1885/93501
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/32/8/008

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