Skip navigation
Skip navigation

A Model of Plasma-Based Ion Implantation Around a Round Hole in a Flat Plate

Sheridan, T


We use a two-dimensional hybrid simulation (particle ions and Boltzmann electrons) to study sheath and ion dynamics around a small round hole in a flat, conducting plate following the application of a large, negative voltage pulse, such as might be encountered during plasma-based ion implantation. Results for hole radii of an eighth and half the ion-matrix overlap length and for depths of one, two and four times the radius are reported. For all these cases, it is found that the hole represents...[Show more]

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/32/8/008


There are no files associated with this item.

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  12 November 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator