Effects of Tube Length and Radius for Inner Surface Plasma Immersion Ion Implantation Using an Auxiliary Electrode
Plasma immersion ion implantation of the inner surface of a finite-length small cylindrical tube with a coaxial, grounded auxiliary electrode is modeled using a two-dimensional particle-in-cell model. Various ratios of tube lengths against tube diameters
|Collections||ANU Research Publications|
|Source:||IEEE Transactions on Plasma Science|
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