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Effects of Tube Length and Radius for Inner Surface Plasma Immersion Ion Implantation Using an Auxiliary Electrode

Kwok, Terry; Zeng, X; Chen, Q; Sheridan, T


Plasma immersion ion implantation of the inner surface of a finite-length small cylindrical tube with a coaxial, grounded auxiliary electrode is modeled using a two-dimensional particle-in-cell model. Various ratios of tube lengths against tube diameters

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
Source: IEEE Transactions on Plasma Science
DOI: 10.1109/27.763123


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