Effects of Tube Length and Radius for Inner Surface Plasma Immersion Ion Implantation Using an Auxiliary Electrode
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Kwok, Terry; Zeng, X; Chen, Q; Sheridan, T
Description
Plasma immersion ion implantation of the inner surface of a finite-length small cylindrical tube with a coaxial, grounded auxiliary electrode is modeled using a two-dimensional particle-in-cell model. Various ratios of tube lengths against tube diameters
| Collections | ANU Research Publications |
|---|---|
| Date published: | 1999 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/93494 |
| Source: | IEEE Transactions on Plasma Science |
| DOI: | 10.1109/27.763123 |
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