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Instability of Nanocavities in Amorphous Silicon

Zhu, Xiaohua; Williams, James; Llewellyn, David; McCallum, J


The influence of implant-induced amorphization and its subsequent solid phase epitaxial growth (SPEG) on the stability of nanocavities in Si was investigated. To monitor the gettering efficiency of cavities, gold was introduced to the wafer before and after amorphization. Rutherford backscattering (RBS) and channeling combined with cross-sectional transmission electron microscopy were used to characterize the samples. The structural observations were also correlated with kinetic data from in...[Show more]

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
Source: Applied Physics Letters


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