Skip navigation
Skip navigation

Instability of Nanocavities in Amorphous Silicon

Zhu, Xiaohua; Williams, James; Llewellyn, David; McCallum, J

Description

The influence of implant-induced amorphization and its subsequent solid phase epitaxial growth (SPEG) on the stability of nanocavities in Si was investigated. To monitor the gettering efficiency of cavities, gold was introduced to the wafer before and after amorphization. Rutherford backscattering (RBS) and channeling combined with cross-sectional transmission electron microscopy were used to characterize the samples. The structural observations were also correlated with kinetic data from in...[Show more]

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
URI: http://hdl.handle.net/1885/93412
Source: Applied Physics Letters

Download

File Description SizeFormat Image
01_Zhu_Instability_of_Nanocavities_in_1999.pdf579.94 kBAdobe PDF    Request a copy


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  20 July 2017/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator