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Structural Changes in Ultra-High-Dose Self-Implanted Crystalline and Amorphous Silicon

Zhu, Xiaohua; Williams, James; McCallum, J

Description

Ultra-high-dose Si ion implantation (1×1018 cm-2) into both amorphous and crystalline Si has been studied as a function of implantation temperature from liquid nitrogen to 250°C. The samples were analysed before and after 600°C annealing by Rutherford

CollectionsANU Research Publications
Date published: 1999
Type: Journal article
URI: http://hdl.handle.net/1885/93410
Source: Nuclear Instruments and Methods in Physics Research: Section B

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