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On the Pulsed Anodic Oxidation of n + -InP

Deenapanray, Prakash; Martin, Anthony H; Lever McGowan, Penelope; Jagadish, Chennupati

Description

We have performed a parametric investigation of the anodic oxidation of highly doped n-type InP(100) using a pulsed current source. Approximately 75% of the oxide growth took place within the first ∼ 10 s of oxidation, and the equilibrium oxide thicknes

CollectionsANU Research Publications
Date published: 2002
Type: Journal article
URI: http://hdl.handle.net/1885/91642
Source: Electrochemical and Solid-State Letters
DOI: 10.1149/1.1477295

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