On the Pulsed Anodic Oxidation of n + -InP
We have performed a parametric investigation of the anodic oxidation of highly doped n-type InP(100) using a pulsed current source. Approximately 75% of the oxide growth took place within the first ∼ 10 s of oxidation, and the equilibrium oxide thicknes
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|Source:||Electrochemical and Solid-State Letters|
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