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On the Segregation of Ca at SiO2/Si Interface During Oxygen Ion Bombardment

Deenapanray, Prakash; Petravic, Mladen


Segregation of Ca in Si has been studied using SIMS and RBS. Pronounced Ca profile broadening is observed during SIMS measurements with oxygen ions under bombardment conditions, yielding the formation of a stoichiometric oxide layer at the surface. Additional profiling through the SiO2/Si interface showed that Ca segregates predominantly at the Si side of the interface, within an a-Si layer adjacent to the continuous SiO2 layer. We explain the migration behaviour of Ca in thermodynamic terms...[Show more]

CollectionsANU Research Publications
Date published: 2000
Type: Journal article
Source: Surface and Interface Analysis
DOI: 10.1002/(SICI)1096-9918(200002)29:2<160::AID-SIA723>3.0.CO;2-B


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