Skip navigation
Skip navigation

On the Segregation of Ca at SiO2/Si Interface During Oxygen Ion Bombardment

Deenapanray, Prakash; Petravic, Mladen

Description

Segregation of Ca in Si has been studied using SIMS and RBS. Pronounced Ca profile broadening is observed during SIMS measurements with oxygen ions under bombardment conditions, yielding the formation of a stoichiometric oxide layer at the surface. Additional profiling through the SiO2/Si interface showed that Ca segregates predominantly at the Si side of the interface, within an a-Si layer adjacent to the continuous SiO2 layer. We explain the migration behaviour of Ca in thermodynamic terms...[Show more]

CollectionsANU Research Publications
Date published: 2000
Type: Journal article
URI: http://hdl.handle.net/1885/90415
Source: Surface and Interface Analysis
DOI: 10.1002/(SICI)1096-9918(200002)29:2<160::AID-SIA723>3.0.CO;2-B

Download

There are no files associated with this item.


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  20 July 2017/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator