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Nitrogen-induced enhancement of the free electron concentration in Sulfur implanted GaNxAs1-x

Yu, Kin Man; Walukiewicz, W; Shan, Wei; Wu, J; Ager, J W; Haller, E E; Garza, J; Ridgway, Mark C

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We have achieved a large increase of the activation efficiency of sulfur atoms implanted into GaNxAs1-x thin films. For thin films with only 0.8% N content, we find a maximum free electron concentration of >6×1018cm-3 for implanted S concentration higher

dc.contributor.authorYu, Kin Man
dc.contributor.authorWalukiewicz, W
dc.contributor.authorShan, Wei
dc.contributor.authorWu, J
dc.contributor.authorAger, J W
dc.contributor.authorHaller, E E
dc.contributor.authorGarza, J
dc.contributor.authorRidgway, Mark C
dc.date.accessioned2015-12-13T23:18:09Z
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/1885/90035
dc.description.abstractWe have achieved a large increase of the activation efficiency of sulfur atoms implanted into GaNxAs1-x thin films. For thin films with only 0.8% N content, we find a maximum free electron concentration of >6×1018cm-3 for implanted S concentration higher
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceApplied Physics Letters
dc.titleNitrogen-induced enhancement of the free electron concentration in Sulfur implanted GaNxAs1-x
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume77
dc.date.issued2000
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationMigratedxPub20301
local.type.statusPublished Version
local.contributor.affiliationYu, Kin Man, Lawrence Livermore National Laboratory
local.contributor.affiliationWalukiewicz, W, Lawrence Berkeley National Laboratory
local.contributor.affiliationShan, Wei, OptiWork, Inc.
local.contributor.affiliationWu, J, Lawrence Berkeley National Laboratory
local.contributor.affiliationAger, J W, Lawrence Berkeley National Laboratory
local.contributor.affiliationHaller, E E, University of California
local.contributor.affiliationGarza, J, Texas Tech University
local.contributor.affiliationRidgway, Mark C, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage2858
local.bibliographicCitation.lastpage2860
dc.date.updated2015-12-12T08:55:39Z
local.identifier.scopusID2-s2.0-0001644919
CollectionsANU Research Publications

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