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Imaging Charge Trap Distributions in GaN Using Environmental Scanning Electron Micrsocopy

Toth, M; Kucheyev, Sergei; Williams, James; Jagadish, Chennupati; Phillips, Matthew R; Li, Gang


We present direct experimental evidence for a field assisted component in images acquired using the gaseous secondary electron detector (GSED) employed in environmental scanning electron microscopes. Enhanced secondary electron (SE) emission was observed

CollectionsANU Research Publications
Date published: 2000
Type: Journal article
Source: Applied Physics Letters


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