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Transmission Electron Microscopy Observation of Deformation Microstructure under Spherical Indentation in Silicon

Bradby, Jodie; Williams, James; Wong-Leung, Yin-Yin (Jennifer); Swain, Michael Vincent; Munroe, Paul


Spherical indentation of crystalline silicon has been studied using cross-sectional transmission electron microscopy (XTEM). Indentation loads were chosen below and above the yield point for silicon to investigate the modes of plastic deformation. Slip planes are visible in the XTEM micrographs in both indentation loads studied. A thin layer of polycrystalline material has been identified (indexed as Si-XII from diffraction patterns) on the low-load indentation. The higher-load indentation...[Show more]

CollectionsANU Research Publications
Date published: 2000
Type: Journal article
Source: Applied Physics Letters


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