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Polycrystallization and Surface Erosion of Amorphous GaN During Elevated Temperature Ion Bombardment

Kucheyev, Sergei; Williams, James; Jagadish, Chennupati; Zou, Jin; Li, Gang

Description

The effects of elevated-temperature ion bombardment of wurtzite GaN films preamorphized by ion implantation are studied by Rutherford backscattering/channeling spectrometry and transmission electron microscopy. Amorphous layers annealed in vacuum at 500°

dc.contributor.authorKucheyev, Sergei
dc.contributor.authorWilliams, James
dc.contributor.authorJagadish, Chennupati
dc.contributor.authorZou, Jin
dc.contributor.authorLi, Gang
dc.date.accessioned2015-12-13T23:16:11Z
dc.identifier.issn0021-8979
dc.identifier.urihttp://hdl.handle.net/1885/89280
dc.description.abstractThe effects of elevated-temperature ion bombardment of wurtzite GaN films preamorphized by ion implantation are studied by Rutherford backscattering/channeling spectrometry and transmission electron microscopy. Amorphous layers annealed in vacuum at 500°
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceJournal of Applied Physics
dc.titlePolycrystallization and Surface Erosion of Amorphous GaN During Elevated Temperature Ion Bombardment
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume88
dc.date.issued2000
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.ariespublicationMigratedxPub19250
local.type.statusPublished Version
local.contributor.affiliationKucheyev, Sergei, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationZou, Jin, University of Queensland
local.contributor.affiliationLi, Gang, ShenZhen Fangda GuoKe Optronics Technical Co Ltd
local.description.embargo2037-12-31
local.bibliographicCitation.startpage5493
local.bibliographicCitation.lastpage5495
dc.date.updated2015-12-12T08:47:02Z
local.identifier.scopusID2-s2.0-0001138179
CollectionsANU Research Publications

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