Charles, Christine; Degeling, Alexander; Sheridan, T; Harris, Jeffrey; Lieberman, M; Boswell, Roderick
Measurements of the rf electric field have been made along the z axis of a helicon reactor using a retarding field energy analyzer. A fluid code and a simple analytical model have been developed to analyze the ion energy distribution functions, especially in the case of bimodal distributions where the ion transit time through the sheath in front of the analyzer is comparable to the rf period. A generalized curve (and an analytical approximation to that curve) has been developed from the...[Show more]
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