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Defective Crystal Recovered from the Crystallization of Potassium-doped Amorphous Silicon Films

Liu, A C Y; McCallum, Jeffrey C; Deenapanray, Prakash

Description

The quality of a crystallized potassium-doped amorphous silicon film was investigated using transmission electron microscopy. It was discovered that the planar epitaxial growth of the amorphous layer was upset after a certain concentration of potassium was encountered by the interface. The crystal recovered subsequent to this point was twinned. The twins lie on {111} planes. The results from the transmission electron microscope analyses were correlated with the rate of solid-phase epitaxy as...[Show more]

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
URI: http://hdl.handle.net/1885/88345
Source: Journal of the Electrochemical Society
DOI: 10.1149/1.1557084

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