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Ultrafast pulsed laser deposition of chalcogenide glass films for low-loss optical waveguides

Luther-Davies, Barry; Kolev, Vesselin Z; Lederer, Maximilian; Ruan, Yinlan; Samoc, Marek; Jarvis, Ruth; Rode, Andrei V; Giesekus, J; Du, K-M; Duering, M.


Ultra-fast pulsed laser deposition using high-repetition-rate short-pulse lasers has been shown to provide high optical quality, super smooth thin films free of scattering centres. The optimized process conditions require short ps or sub-ps pulses with repetition rate in the range 1-100 MHz, depending on the target material. Ultra-fast pulsed laser deposition was used to successfully deposit atomicaliy-smooth, Smicron thick As2S3 films. The as-deposited films were photosensitive at wavelengths...[Show more]

CollectionsANU Research Publications
Date published: 2003
Type: Conference paper
Source: Materials Research Society Symposium Proceedings Volume 780


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