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Breakdown Behavior in Radio-frequency Argon Discharges

Smith, Heather; Charles, Christine; Boswell, Roderick

Description

The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
URI: http://hdl.handle.net/1885/87108
Source: Physics of Plasmas
DOI: 10.1063/1.1531615

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