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Energy Balance in a Low Pressure Capacitive Discharge Driven by a Double-saddle Antenna

Charles, Christine; Boswell, Roderick; Lieberman, M


The energy balance in a low pressure capacitive discharge driven by a double-saddle antenna was investigated. The palsma parameters were measured by using a retarding field energy analyzers. The results showed that the ion acceleration into the glass along the antenna and fast electrons escaping the plasma accounted for most of the power deposition to the walls.

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.1555058


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