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Effect of Microcavity Structures on the Photoluminescence of Silicon Nanocrystals

Spooner, M G; Walsh, T M; Elliman, Robert

Description

Optical microcavity structures containing Si nanocrystals are fabricated by plasma enhanced chemical vapour deposition (PECVD) of SiO2 Si3N4 and SiOx layers. The nanocrystals are formed within Si-rich oxide layers (SiOx) by precipitation and growth, and the microcavity structures defined by two parallel distributed Bragg mirrors (DBM) made from either alternate SiO2/Si3N4 layers or alternate SiO2/SiOx layers. In the latter case, Si nanocrystal layers form part of the DBM structure thereby...[Show more]

dc.contributor.authorSpooner, M G
dc.contributor.authorWalsh, T M
dc.contributor.authorElliman, Robert
dc.coverage.spatialSan Francisco USA
dc.date.accessioned2015-12-13T23:09:20Z
dc.date.available2015-12-13T23:09:20Z
dc.date.createdApril 21 2003
dc.identifier.isbn1558997075
dc.identifier.urihttp://hdl.handle.net/1885/86949
dc.description.abstractOptical microcavity structures containing Si nanocrystals are fabricated by plasma enhanced chemical vapour deposition (PECVD) of SiO2 Si3N4 and SiOx layers. The nanocrystals are formed within Si-rich oxide layers (SiOx) by precipitation and growth, and the microcavity structures defined by two parallel distributed Bragg mirrors (DBM) made from either alternate SiO2/Si3N4 layers or alternate SiO2/SiOx layers. In the latter case, Si nanocrystal layers form part of the DBM structure thereby providing a distributed emission source. The optical emission from these and related structures are examined and compared with that from isolated nanocrystal layers.
dc.publisherMaterials Research Society
dc.relation.ispartofseriesMaterials Research Society Meeting Spring 2003
dc.sourceOptoelectronics of Group-IV-Based Materials-Symposium I
dc.subjectKeywords: Charge coupled devices; Diffraction gratings; Light reflection; Mirrors; Nanostructured materials; Photoluminescence; Plasma enhanced chemical vapor deposition; Precipitation (chemical); Refractive index; Semiconductor lasers; Solid state lasers; Distribu
dc.titleEffect of Microcavity Structures on the Photoluminescence of Silicon Nanocrystals
dc.typeConference paper
local.description.notesImported from ARIES
local.description.refereedYes
dc.date.issued2003
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.ariespublicationMigratedxPub16019
local.type.statusPublished Version
local.contributor.affiliationSpooner, M G, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWalsh, T M, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationElliman, Robert, College of Physical and Mathematical Sciences, ANU
local.bibliographicCitation.startpage51
local.bibliographicCitation.lastpage56
dc.date.updated2015-12-12T08:18:38Z
local.identifier.scopusID2-s2.0-1542364493
CollectionsANU Research Publications

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