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Effect of Microcavity Structures on the Photoluminescence of Silicon Nanocrystals

Spooner, M G; Walsh, T M; Elliman, Robert


Optical microcavity structures containing Si nanocrystals are fabricated by plasma enhanced chemical vapour deposition (PECVD) of SiO2 Si3N4 and SiOx layers. The nanocrystals are formed within Si-rich oxide layers (SiOx) by precipitation and growth, and the microcavity structures defined by two parallel distributed Bragg mirrors (DBM) made from either alternate SiO2/Si3N4 layers or alternate SiO2/SiOx layers. In the latter case, Si nanocrystal layers form part of the DBM structure thereby...[Show more]

CollectionsANU Research Publications
Date published: 2003
Type: Conference paper
Source: Optoelectronics of Group-IV-Based Materials-Symposium I


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