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In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

Ruault, M-O; Ridgway, Mark C; Fortuna, Frank Nicholas; Bernas, Harry; Williams, James


We report an in situ transmission electron microscopy (TEM) study of nanocavity evolution in amorphous Si (a-Si) under ion beam irradiation. The size evolution of the nanocavities was monitored during ion irradiation with Si or As at various temperatures

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: European Physical Journal - Applied Physics


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