Skip navigation
Skip navigation

In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

Ruault, M-O; Ridgway, Mark C; Fortuna, Frank Nicholas; Bernas, Harry; Williams, James

Description

We report an in situ transmission electron microscopy (TEM) study of nanocavity evolution in amorphous Si (a-Si) under ion beam irradiation. The size evolution of the nanocavities was monitored during ion irradiation with Si or As at various temperatures

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
URI: http://hdl.handle.net/1885/86903
Source: European Physical Journal - Applied Physics

Download

There are no files associated with this item.


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  23 August 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator