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EXAFS Measurements of Metal-decorated Nanocavities in Si

de Azevedo, Gustavo; Ridgway, Mark C; Betlehem, J; Yu, Kin Man; Glover, C J; Foran, Garry J


The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(02)01430-1


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