Skip navigation
Skip navigation

Damage studies in dry etched textured silicon surfaces

Kumaravelu, G; Alkaisi, M M; Bittar, A; MacDonald, Daniel; Zhao, J

Description

Surface texturing is a more permanent and effective solution to eliminate reflections compared with antireflection coatings in optical devices. In this study texturing was performed using a reactive ion etching technique, reflectance was measured and the

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
URI: http://hdl.handle.net/1885/86362
Source: Current Applied Physics
DOI: 10.1016/j.cap.2003.10.008

Download

File Description SizeFormat Image
01_Kumaravelu_Damage_studies_in_dry_etched_2004.pdf287.45 kBAdobe PDF    Request a copy


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  20 July 2017/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator