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Damage studies in dry etched textured silicon surfaces

Kumaravelu, G; Alkaisi, M M; Bittar, A; MacDonald, Daniel; Zhao, J


Surface texturing is a more permanent and effective solution to eliminate reflections compared with antireflection coatings in optical devices. In this study texturing was performed using a reactive ion etching technique, reflectance was measured and the

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Current Applied Physics
DOI: 10.1016/j.cap.2003.10.008


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