Skip navigation
Skip navigation

The Effect of Au and O Implantation on the Etch Rate of CVD Diamond

Leech, P W; Reeves, G K; Holland, A S; Ridgway, Mark C


Diamond films were implanted with Au or O ions at multiple energies in order to produce a uniform region of C vacancies. Analysis of the implanted films by Raman spectroscopy has shown that the proportion of non-diamond or amorphous carbon increased with

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Applied Surface Science
DOI: 10.1016/S0169-4332(03)00949-8


File Description SizeFormat Image
01_Leech_The_Effect_of_Au_and_O_2004.pdf110.83 kBAdobe PDF    Request a copy

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator