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The Effect of Au and O Implantation on the Etch Rate of CVD Diamond

Leech, P W; Reeves, G K; Holland, A S; Ridgway, Mark C

Description

Diamond films were implanted with Au or O ions at multiple energies in order to produce a uniform region of C vacancies. Analysis of the implanted films by Raman spectroscopy has shown that the proportion of non-diamond or amorphous carbon increased with

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
URI: http://hdl.handle.net/1885/86269
Source: Applied Surface Science
DOI: 10.1016/S0169-4332(03)00949-8

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