Nitrogen depletion of indium nitride films during Elastic Recoil Detection analysis
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Shrestha, Santosh K; Timmers, Heiko; Butcher, Kenneth Scott A; Wintrebert-Fouquet, Marie; Chen, Patrick
Description
Elastic Recoil Detection analysis of different types of indium nitride films has been performed using a 200 MeV Au beam. Recoil ions were detected with a gas ionisation detector featuring a large detection solid angle. Severe and non-linear nitrogen depletion has been observed, with films grown by RF-sputtering losing nitrogen more quickly than MBE-grown films. Assuming the formation of molecular nitrogen as the decisive step leading to nitrogen loss, the nitrogen depletion process has been...[Show more]
dc.contributor.author | Shrestha, Santosh K | |
---|---|---|
dc.contributor.author | Timmers, Heiko | |
dc.contributor.author | Butcher, Kenneth Scott A | |
dc.contributor.author | Wintrebert-Fouquet, Marie | |
dc.contributor.author | Chen, Patrick | |
dc.date.accessioned | 2015-12-13T23:04:23Z | |
dc.identifier.issn | 0168-583X | |
dc.identifier.uri | http://hdl.handle.net/1885/85349 | |
dc.description.abstract | Elastic Recoil Detection analysis of different types of indium nitride films has been performed using a 200 MeV Au beam. Recoil ions were detected with a gas ionisation detector featuring a large detection solid angle. Severe and non-linear nitrogen depletion has been observed, with films grown by RF-sputtering losing nitrogen more quickly than MBE-grown films. Assuming the formation of molecular nitrogen as the decisive step leading to nitrogen loss, the nitrogen depletion process has been modelled using the bulk molecular recombination model. The model allows accurate extrapolations of the original nitrogen content of the material. Since the other important elements can also be quantified, the stoichiometry of the film can thus reliably be obtained from Elastic Recoil Detection analysis. All the films analysed have been found to have excess nitrogen. | |
dc.publisher | Elsevier | |
dc.source | Nuclear Instruments and Methods in Physics Research: Section B | |
dc.subject | Keywords: Ionization; Radiation detectors; Radiation effects; Semiconducting films; Semiconducting indium compounds; Stoichiometry; Bulk molecular recombination; Compositional analysis; Elastic recoil detection; Indium nitride films; Ion beam analysis; Nitrogen dep Bulk molecular recombination; Compositional analysis; Elastic recoil detection; Indium nitride films; Ion beam analysis; Nitrogen depletion; Radiation effects in semiconductors | |
dc.title | Nitrogen depletion of indium nitride films during Elastic Recoil Detection analysis | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.citationvolume | 234 | |
dc.date.issued | 2005 | |
local.identifier.absfor | 090699 - Electrical and Electronic Engineering not elsewhere classified | |
local.identifier.ariespublication | MigratedxPub13701 | |
local.type.status | Published Version | |
local.contributor.affiliation | Shrestha, Santosh K, University of New South Wales, ADFA | |
local.contributor.affiliation | Timmers, Heiko, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Butcher, Kenneth Scott A, Macquarie University | |
local.contributor.affiliation | Wintrebert-Fouquet, Marie, Macquarie University | |
local.contributor.affiliation | Chen, Patrick, Macquarie University | |
local.description.embargo | 2037-12-31 | |
local.bibliographicCitation.startpage | 291 | |
local.bibliographicCitation.lastpage | 307 | |
local.identifier.doi | 10.1016/j.nimb.2005.01.022 | |
dc.date.updated | 2015-12-12T07:55:42Z | |
local.identifier.scopusID | 2-s2.0-19844371012 | |
Collections | ANU Research Publications |
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