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Nitrogen depletion of indium nitride films during Elastic Recoil Detection analysis

Shrestha, Santosh K; Timmers, Heiko; Butcher, Kenneth Scott A; Wintrebert-Fouquet, Marie; Chen, Patrick


Elastic Recoil Detection analysis of different types of indium nitride films has been performed using a 200 MeV Au beam. Recoil ions were detected with a gas ionisation detector featuring a large detection solid angle. Severe and non-linear nitrogen depletion has been observed, with films grown by RF-sputtering losing nitrogen more quickly than MBE-grown films. Assuming the formation of molecular nitrogen as the decisive step leading to nitrogen loss, the nitrogen depletion process has been...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2005.01.022


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