Reconfigurable optofluidic silicon-based photonic crystal components

Abstract

We report reconfigurable optofluidic photonic crystal components in silicon-based membranes by controllably infiltrating and removing fluid from holes of the photonic crystal lattice. Systematic characterizations of our fluidicallydefined microcavities are presented, corresponding with the capability to increase or decrease the span of the fluid-filled regions and thus alter their optical properties. We show initial images of single-pore fluid infiltration for holes of diameter 265 nm. Furthermore, the infiltration process may employ a large range of optical fluids, adding more flexibility to engineer device functionality. We discuss the great potential offered by this optofluidic scheme for integrated optofluidic circuits, sensing, fluorescence and plasmonic applications.