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Traceable nanoscale length metrology using a metrological Scanning Probe Microscope

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Lawn, Malcolm; Hermann, Jan; Freund, Christopher H; Miles, John; Gray, Malcolm B; Shaddock, Daniel; Coleman, Victoria A; Jamting, Asa K

Description

We give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI...[Show more]

dc.contributor.authorLawn, Malcolm
dc.contributor.authorHermann, Jan
dc.contributor.authorFreund, Christopher H
dc.contributor.authorMiles, John
dc.contributor.authorGray, Malcolm B
dc.contributor.authorShaddock, Daniel
dc.contributor.authorColeman, Victoria A
dc.contributor.authorJamting, Asa K
dc.coverage.spatialMonterey, CA
dc.date.accessioned2015-12-13T23:00:17Z
dc.date.available2015-12-13T23:00:17Z
dc.date.createdMay 17-19 2010
dc.identifier.isbn9780819482174
dc.identifier.urihttp://hdl.handle.net/1885/84051
dc.description.abstractWe give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI meter at NMIA. The instrument will provide a measurement volume of 100 μm × 100 μm × 25 μm with a target uncertainty of 1 nm for the position measurement.
dc.publisherSPIE - The International Society for Optical Engineering
dc.relation.ispartofseriesScanning Microscopy 2010
dc.sourceProceedings of SPIE - The International Society for Optical Engineering
dc.subjectKeywords: AFM; Australia; Dimensional measurements; Length metrology; Measurement volume; Nano scale; Nano-meter scale; Nanometrology; National measurement institute; Non-contact mode; Quartz tuning fork; Scanning probe microscope; Atomic force microscopy; Oxide mi AFM; interferometry; mSPM; non-contact mode; quartz tuning fork
dc.titleTraceable nanoscale length metrology using a metrological Scanning Probe Microscope
dc.typeConference paper
local.description.notesImported from ARIES
local.description.refereedYes
dc.date.issued2010
local.identifier.absfor020500 - OPTICAL PHYSICS
local.identifier.absfor020604 - Quantum Optics
local.identifier.ariespublicationf5625xPUB12315
local.type.statusPublished Version
local.contributor.affiliationLawn, Malcolm, National Measurement Institute
local.contributor.affiliationHermann, Jan, National Measurement Institute
local.contributor.affiliationFreund, Christopher H, National Measurement Institute
local.contributor.affiliationMiles, John, National Measurement Institute
local.contributor.affiliationGray, Malcolm B, National Measurement Institute
local.contributor.affiliationShaddock, Daniel, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationColeman, Victoria A, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJamting, Asa K, National Measurement Institute
local.bibliographicCitation.startpage1
local.bibliographicCitation.lastpage8
local.identifier.doi10.1117/12.853788
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
dc.date.updated2016-02-24T08:41:28Z
local.identifier.scopusID2-s2.0-77954478712
CollectionsANU Research Publications

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