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Traceable nanoscale length metrology using a metrological Scanning Probe Microscope

Lawn, Malcolm; Hermann, Jan; Freund, Christopher H; Miles, John; Gray, Malcolm B; Shaddock, Daniel; Coleman, Victoria A; Jamting, Asa K

Description

We give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
URI: http://hdl.handle.net/1885/84051
Source: Proceedings of SPIE - The International Society for Optical Engineering
DOI: 10.1117/12.853788

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