Traceable nanoscale length metrology using a metrological Scanning Probe Microscope
We give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI...[Show more]
|Collections||ANU Research Publications|
|Source:||Proceedings of SPIE - The International Society for Optical Engineering|
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