Protection of Si-Sio2 interfaces from damp heat by overlying SiNx and Si3N4 coatings
PECVD SiNx antireflection coatings are found to suppress the degradation of an underlying oxide during "damp-heat" exposure. Samples are submitted to 85 °C and 85% relative humidity, replicating the damp-heat conditions of the standard reliability tests
|Collections||ANU Research Publications|
|Source:||Conference Record of the IEEE Photovoltaic Specialists Conference|
|01_DAI_Protection_of_Si-Sio2_2010.pdf||44.53 kB||Adobe PDF||Request a copy|
|02_DAI_Protection_of_Si-Sio2_2010.pdf||877.59 kB||Adobe PDF||Request a copy|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.