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Protection of Si-Sio2 interfaces from damp heat by overlying SiNx and Si3N4 coatings

DAI, Xi; McIntosh, Keith

Description

PECVD SiNx antireflection coatings are found to suppress the degradation of an underlying oxide during "damp-heat" exposure. Samples are submitted to 85 °C and 85% relative humidity, replicating the damp-heat conditions of the standard reliability tests

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
URI: http://hdl.handle.net/1885/83917
Source: Conference Record of the IEEE Photovoltaic Specialists Conference
DOI: 10.1109/PVSC.2010.5616776

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