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Nanoscale energy generation characteristics of piezoelectric thin films

Bhaskaran, Madhu; Sriram, Sharath; Ruffell, Simon; Mitchell, Arnan


The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
Source: Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD
DOI: 10.1109/COMMAD.2010.5699710


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