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A comparison between experimental results and a fluid description of a low pressure discharge driven by a double-saddle antenna

Yoon, Y; Charles, Christine; Boswell, Roderick

Description

The diffusion of a 160 W argon plasma from a 13.56 MHz cylindrical (6 cm diameter, 20 cm long) magnetic field-free source into a 30 cm diameter and 20 cm long diffusion chamber has been investigated experimentally and by simulation. The rf power is coupled to the plasma using a double-saddle antenna. Experimentally, the radial plasma density and potential profiles across the source exit and the electron temperature are measured using an energy analyser operating in ion and electron collection...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Journal article
URI: http://hdl.handle.net/1885/83229
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/38/16/013

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