A comparison between experimental results and a fluid description of a low pressure discharge driven by a double-saddle antenna
The diffusion of a 160 W argon plasma from a 13.56 MHz cylindrical (6 cm diameter, 20 cm long) magnetic field-free source into a 30 cm diameter and 20 cm long diffusion chamber has been investigated experimentally and by simulation. The rf power is coupled to the plasma using a double-saddle antenna. Experimentally, the radial plasma density and potential profiles across the source exit and the electron temperature are measured using an energy analyser operating in ion and electron collection...[Show more]
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|Source:||Journal of Physics D: Applied Physics|
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