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The effect of phase difference between powered electrodes on RF plasmas

Proschek, M; Yin, Yongbai; Charles, Christine; Aanesland, Ane; McKenzie, David R.; Bilek, Marcela; Boswell, Roderick

Description

This paper presents the results of measurements carried out on plasmas created in five different RF discharge systems. These systems all have two separately powered RF (13.56 MHz) electrodes, but differ in overall size and in the geometry of both vacuum chambers and RF electrodes or antennae. The two power supplies were synchronized with a phase-shift controller. We investigated the influence of the phase difference between the two RF electrodes on plasma parameters and compared the different...[Show more]

dc.contributor.authorProschek, M
dc.contributor.authorYin, Yongbai
dc.contributor.authorCharles, Christine
dc.contributor.authorAanesland, Ane
dc.contributor.authorMcKenzie, David R.
dc.contributor.authorBilek, Marcela
dc.contributor.authorBoswell, Roderick
dc.date.accessioned2015-12-13T22:57:59Z
dc.identifier.issn0963-0252
dc.identifier.urihttp://hdl.handle.net/1885/83223
dc.description.abstractThis paper presents the results of measurements carried out on plasmas created in five different RF discharge systems. These systems all have two separately powered RF (13.56 MHz) electrodes, but differ in overall size and in the geometry of both vacuum chambers and RF electrodes or antennae. The two power supplies were synchronized with a phase-shift controller. We investigated the influence of the phase difference between the two RF electrodes on plasma parameters and compared the different system geometries. Single Langmuir probes were used to measure the plasma parameters in a region between the electrodes. Floating potential and ion density were affected by the phase difference and we found a strong influence of the system geometry on the observed phase difference dependence. Both ion density and floating potential curves show asymmetries around maxima and minima. These asymmetries can be explained by a phase dependence of the time evolution of the electrode-wall coupling within an RF-cycle resulting from the asymmetric system geometry.
dc.publisherInstitute of Physics Publishing
dc.sourcePlasma Sources Science and Technology
dc.subjectKeywords: Electrodes; Frequencies; Geometry; Phase shift; Synchronization; Phase difference; Phase-shift controllers; RF discharge systems; RF-cycle; Plasmas
dc.titleThe effect of phase difference between powered electrodes on RF plasmas
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume14
dc.date.issued2005
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationMigratedxPub11445
local.type.statusPublished Version
local.contributor.affiliationProschek, M, University of Sydney
local.contributor.affiliationYin, Yongbai, University of Sydney
local.contributor.affiliationCharles, Christine, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationAanesland, Ane, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMcKenzie, David R., University of Sydney
local.contributor.affiliationBilek, Marcela, University of Sydney
local.contributor.affiliationBoswell, Roderick, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage407
local.bibliographicCitation.lastpage411
local.identifier.doi10.1088/0963-0252/14/3/001
dc.date.updated2015-12-12T07:20:02Z
local.identifier.scopusID2-s2.0-23844452327
CollectionsANU Research Publications

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