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The effect of phase difference between powered electrodes on RF plasmas

Proschek, M; Yin, Yongbai; Charles, Christine; Aanesland, Ane; McKenzie, David R.; Bilek, Marcela; Boswell, Roderick

Description

This paper presents the results of measurements carried out on plasmas created in five different RF discharge systems. These systems all have two separately powered RF (13.56 MHz) electrodes, but differ in overall size and in the geometry of both vacuum chambers and RF electrodes or antennae. The two power supplies were synchronized with a phase-shift controller. We investigated the influence of the phase difference between the two RF electrodes on plasma parameters and compared the different...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Journal article
URI: http://hdl.handle.net/1885/83223
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/14/3/001

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