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Single-step microstructure patterning in titania-doped sol-gel glassy thin films with electron beams

Luo, Xinshi; Zha, Congji; Luther-Davies, Barry


To achieve a simplified microstructure patterning process, patterning in thin films with a single-step exposure to UV-light or E-beam process for fabrication of integrated optical waveguides and components is of great interest in optics, because the complicated structure developing stage by wet chemical or plasma etching is not required. In this paper, we describe our study on the microstructure patterning in TiO2-doped hybrid glassy polymer thin films by irradiating with focused E-beam. An...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Conference paper
Source: Materials Research Society Symposium Proceedings Volume 847


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