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Electron transport coefficients in O 2 magnetron discharges

White, Ronald Douglas; Robson, Robert; Ness, Kevin F; Makabe, T

Description

Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Journal article
URI: http://hdl.handle.net/1885/81348
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/38/7/006

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