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Ion implanted dielectric films for an improved optical and electronic silicon photovoltaic response

Shalav, Avi; Henderson, Christian; Ratcliff, Thomas; Thomson, Andrew


Over the past few years, ion implanters specifically developed for the high throughput required by the silicon photovoltaic industry, have become commercially available. Recent research and development has focused on the formation of doped surface regions

CollectionsANU Research Publications
Date published: 2013
Type: Conference paper
Source: Materials Research Society Symposium Proceedings
DOI: 10.1557/opl.2012.1674


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