Helicon plasma with additional immersed antenna
A 'primary' RF power (H-power) at 13.56 MHz is coupled to a plasma source excited by an external double saddle field Helicon antenna. A 'secondary' RF power (S-power), also at 13.56 MHz but with variable phase, is additionally coupled by inserting a second antenna in contact with the plasma through one end of the source. The immersed antenna can be grounded or floating, allowing a self-bias to form in the latter case. Changes in the plasma density and electron temperature are measured in both...[Show more]
|Collections||ANU Research Publications|
|Source:||Journal of Physics D: Applied Physics|
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