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Helicon plasma with additional immersed antenna

Aanesland, Ane; Charles, Christine; Boswell, Roderick; Frederiksen, Ashild

Description

A 'primary' RF power (H-power) at 13.56 MHz is coupled to a plasma source excited by an external double saddle field Helicon antenna. A 'secondary' RF power (S-power), also at 13.56 MHz but with variable phase, is additionally coupled by inserting a second antenna in contact with the plasma through one end of the source. The immersed antenna can be grounded or floating, allowing a self-bias to form in the latter case. Changes in the plasma density and electron temperature are measured in both...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
URI: http://hdl.handle.net/1885/81015
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/37/9/006

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