Michael, Clive; Howard, John; Blackwell, Boyd
The influence of ion-neutral collisions on the ion and neutral distribution functions in low field radio frequency (rf) heated argon discharges was investigated. In order to obtain some insight into the ion heating mechanism and to resolve apparent inconsistencies between probe and spectroscopic measurements of the ion temperature, the measurements were initially undertaken. It was found that the measurements of the ion distribution function reveal a substantially elevated fraction of low...[Show more]
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