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Comparison between experiment and two simulation strategies for the extraction of focused ion beams

Sutherland, Orson; Boswell, Roderick; Keller, J; Irzyk, M


A typical ray-tracing code, PBgun, was compared to a particle-in-cell (PIC) code called simulation d'extraction de faisceaux d'ions (SEFI) and a single aperture, three electrode extraction experiment. Medium current extraction from a high density plasma source with a three electrode extraction system was described. It was shown that SEFI could accurately predict the function of extracted current versus extraction voltage and that PBgun gave accurate simulations when the current or current...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Review of Scientific Instruments
DOI: 10.1063/1.1753669


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