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Micro-arcing instability in radio frequency plasmas

Yin, Yongbai; Bilek, Marcela; McKenzie, David R.; Boswell, Roderick; Charles, Christine

Description

Micro-arcing and breakdown of the wall plasma sheath in radio frequency (RF) plasmas is studied in a hollow cathode system, using a Langmuir probe to measure the floating potential. Micro-arcing was induced reproducibly by controlling the floating potential. By dc grounding the hollow cathode, a negative current can flow to ground resulting in a higher voltage sheath between the plasma and the earthed vacuum vessel. The wall arcing threshold of the plasma potential in this system is in the...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
URI: http://hdl.handle.net/1885/80955
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/37/20/014

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