Skip navigation
Skip navigation

Micro-arcing instability in radio frequency plasmas

Yin, Yongbai; Bilek, Marcela; McKenzie, David R.; Boswell, Roderick; Charles, Christine


Micro-arcing and breakdown of the wall plasma sheath in radio frequency (RF) plasmas is studied in a hollow cathode system, using a Langmuir probe to measure the floating potential. Micro-arcing was induced reproducibly by controlling the floating potential. By dc grounding the hollow cathode, a negative current can flow to ground resulting in a higher voltage sheath between the plasma and the earthed vacuum vessel. The wall arcing threshold of the plasma potential in this system is in the...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/37/20/014


There are no files associated with this item.

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator