Micro-arcing instability in radio frequency plasmas
Micro-arcing and breakdown of the wall plasma sheath in radio frequency (RF) plasmas is studied in a hollow cathode system, using a Langmuir probe to measure the floating potential. Micro-arcing was induced reproducibly by controlling the floating potential. By dc grounding the hollow cathode, a negative current can flow to ground resulting in a higher voltage sheath between the plasma and the earthed vacuum vessel. The wall arcing threshold of the plasma potential in this system is in the...[Show more]
|Collections||ANU Research Publications|
|Source:||Journal of Physics D: Applied Physics|
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