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Hydrogen Softening and Optical Transparency in Si-incorporated Hyrogenated Amorphous Carbon Films

Abbas, G A; Papakonstantinou, P; McLaughlin, J A; Dall (previously Weijers), Tessica; Elliman, Robert; Filik, J


High-resolution x-ray reflectivity (XRR) and heavy-ion elastic recoil detection were employed to study the role of hydrogen on the softening behavior observed in Si-incorporated hydrogenated amorphous carbon (Si-a-C:H) films synthesized by plasma-enhanced chemical-vapor deposition using tetramethylsilane (TMS) precursor in C2 H2 Ar plasma. An enhancement of the optical band gap and a massive reduction in the density of the films prepared at high TMS flow rate were revealed, respectively, by...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.2132088


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