Low Energy Electron-Molecule Collision Cross Sections
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Buckman, Stephen; Panajotovic, Radmila; Symul, Milica
Description
Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental...[Show more]
dc.contributor.author | Buckman, Stephen | |
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dc.contributor.author | Panajotovic, Radmila | |
dc.contributor.author | Symul, Milica | |
dc.date.accessioned | 2015-12-13T22:40:22Z | |
dc.date.available | 2015-12-13T22:40:22Z | |
dc.identifier.issn | 0031-8949 | |
dc.identifier.uri | http://hdl.handle.net/1885/78214 | |
dc.description.abstract | Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental data. In each case we make comparison of the measured cross sections with results derived from the analysis of transport data from electron swarm experiments. | |
dc.publisher | Royal Swedish Academy of Sciences | |
dc.source | Physica Scripta | |
dc.subject | Keywords: Data reduction; Electric excitation; Plasma applications; Resonance; Semiconductor materials; Atmospheric phenomena; Cross sections; Electron molecule scattering; Technological applications; Electron scattering | |
dc.title | Low Energy Electron-Molecule Collision Cross Sections | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.citationvolume | T110 | |
dc.date.issued | 2004 | |
local.identifier.absfor | 020201 - Atomic and Molecular Physics | |
local.identifier.ariespublication | MigratedxPub6891 | |
local.type.status | Published Version | |
local.contributor.affiliation | Buckman, Stephen, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Panajotovic, Radmila, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Symul, Milica, College of Physical and Mathematical Sciences, ANU | |
local.bibliographicCitation.startpage | 166 | |
local.bibliographicCitation.lastpage | 171 | |
local.identifier.doi | 10.1238/Physica.Topical.110a00166 | |
dc.date.updated | 2015-12-11T09:55:34Z | |
local.identifier.scopusID | 2-s2.0-33644489972 | |
Collections | ANU Research Publications |
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