Low Energy Electron-Molecule Collision Cross Sections
-
Altmetric Citations
Buckman, Stephen; Panajotovic, Radmila; Symul, Milica
Description
Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental...[Show more]
Collections | ANU Research Publications |
---|---|
Date published: | 2004 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/78214 |
Source: | Physica Scripta |
DOI: | 10.1238/Physica.Topical.110a00166 |
Download
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.
Updated: 17 November 2022/ Responsible Officer: University Librarian/ Page Contact: Library Systems & Web Coordinator