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Low Energy Electron-Molecule Collision Cross Sections

Buckman, Stephen; Panajotovic, Radmila; Symul, Milica


Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Physica Scripta
DOI: 10.1238/Physica.Topical.110a00166


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