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Heavy Ion Elastic Recoil Detection Analysis of Silicon-Rich Silica Films

Dall (previously Weijers), Tessica; Elliman, Robert; Timmers, Heiko


Heavy ion elastic recoil detection (ERD) is shown to be a powerful tool for studying the deposition and processing of Si-rich silica films deposited by plasma enhanced chemical vapour deposition (PECVD). Such films are of interest for the fabrication of SiO2 layers containing silicon nanocrystals and are commonly deposited using SiH4 and N2O source gases. Heavy ion ERD reveals that as-deposited films can contain high concentrations of N, potentially reducing the efficacy of nanocrystal...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2004.01.142


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